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MKS Instruments 1153A-15215 Vapor Source MFC Type 1153 Working Surplus img{max-width:100%} Oriental Motor UDX5107 5-PhaseMKS Instruments 1153A 15215 Vapor Source MFC Type 1153 Working Surplus Part No: 1153A 15215 Model No: Type 1153 Range Gas: 30 SCCM, Parylene A Fitting: 4VCR (3 4") Made in the USA This MKS Instruments 1153A 15215 Vapor Source MFC Type 1153 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H =