Princeton ST-116 Optical Emission System Lucas Plasma-Therm Clusterlock Working TEL Tokyo Electron HA-026 RY

TEL Tokyo Electron HA-026 RY CHEM #02 Relay Board PCB PHA-015-0 Used Working

The unit does not include the front cover panel (see photos)

Part No: 1243-L6281-302

Inventory # A-19090

Part No: 8-4030-03

Princeton ST-116 Optical Emission System Lucas Plasma-Therm Clusterlock Working TEL Tokyo Electron HA-026 RYPrinceton ST 116 Optical Emission System Lucas Plasma Therm Clusterlock Working Part No: ST 116 Model No: OPTICAL EMISSION SYSTEM Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System This item is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 24"x24"x24" @ 40 lbs.